Megahertz monocrystalline optomechanical resonators with minimal dissipation

Author(s): G. D. Cole, I. Wilson-Rae, M. R. Vanner, S. Gröblacher, J. Pohl, M. Zorn, M. Z. M. Weyers, A. Peters, M. Aspelmeyer

Journal: Micro Electro Mechanical Systems (MEMS)

Volume: 2010

Page(s): 847 - 850

Year: 2010

DOI Number: 10.1109/MEMSYS.2010.5442339

Link: Link to publication


We present detailed experimental and theoretical results for novel micro-optomechanical resonators, representing a significant improvement in the performance of such structures. These devices exhibit eigenfrequencies (fr) approaching 4 MHz, reflectivities exceeding 99.98% at 1064 nm, and mechanical quality factors (Q) of 0.8 × 105 (measured at 20 K and 2.5 × 10-7 millibar pressure); yielding a Q·fr product of 3.1 × 1011 Hz, while enabling a finesse of approximately 20,000 when used as an end mirror in an impedance-matched Fabry-Perot optical cavity. These results represent a breakthrough in the development of optomechanical devices applicable to the emerging field of quantum optomechanics.

Note: 23rd IEEE International Conference on Microelectromechanical Systems, Hong Kong SAR, China, 24-28 January 2010, TP133

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