A high-reflectivity high-Q micromechanical Bragg-mirror

Author(s): H. R. Böhm, S. Gigan, F. Blaser, A. Zeilinger, M. Aspelmeyer

Journal: Applied Physics Letters

Volume: 89

Page(s): 223101

Year: 2006

DOI Number: 10.1063/1.2393000

Link: Link to publication


The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of

approximately 104. Using this micromirror in a Fabry-Pérot cavity, a finesse of 500 has beenachieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.

Note: http://arxiv.org/abs/cond-mat/0607771

File: Link to PDF

Aspelmeyer Group Aspelmeyer Group , Zeilinger Group