Two-dimensional sub-5-nm hard x-ray focusing with MZP

Author(s): M. Osterhoff, M. Bartels, F. Döring, C. Eberl, T. Hoinkes, S. Hoffmann, T. Liese, V. Radisch, A. Rauschenbeutel, A. Robisch, A. Ruhlandt, F. Schlenkrich, T. Salditt, H. Krebs

Journal: Proc. SPIE

Volume: 8848

Year: 2013

DOI Number: 10.1117/12.2025389

Link: Link to publication


We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm × 200 nm; in their defocus, two MZP lenses of diameter of 1.6 µm and 3.7 µm have been placed, with focal lengths of 50 µm and 250 µm respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm × 4.7 nm (7:9 keV, W/Si)1 and 4.3 nm ×5.9 nm (13:8 keV, W/ZrO2), respectively.

Note: Advances in X-Ray/EUV Optics and Components VIII

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